Capacitively coupled radio-frequency discharges in nitrogen at low-pressure
| Autor(a) principal: | |
|---|---|
| Data de Publicação: | 2011 |
| Outros Autores: | , , , , , , , |
| Idioma: | eng |
| Título da fonte: | Repositórios Científicos de Acesso Aberto de Portugal (RCAAP) |
| Texto Completo: | http://hdl.handle.net/1822/14559 |
Resumo: | Apresentação em poster; publicado em: Bulletin of the American Physical Society. 56:15 (2011). |
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Capacitively coupled radio-frequency discharges in nitrogen at low-pressureApresentação em poster; publicado em: Bulletin of the American Physical Society. 56:15 (2011).This paper studies capacitively coupled radio-frequency discharges (13.56MHz frequency) in pure nitrogen, produced within the LATMOS and the GREMI cylindrical parallel-plate reactors, surrounded by a lateral grounded grid, at 2-30W coupled powers and 0.2-1 mbar pressures. Simulations use an hybrid code [1] that couples a 2D (r,z) time-dependent fuid module for the charged particles and a 0D kinetic module for the nitrogen (atomic and molecular) neutral species. The coupling between these modules adopts the local mean energy approximation to define space-time dependent electron parameters for the fuid module and to work-out space-time average rates for the kinetic module. The model gives good predictions for the self-bias voltage and for the intensities of radiative transitions (average and spatially-resolved OES measurements)with the nitrogen SPS and FNS, and with the argon 811nm atomic line (present as an actinometer). Model results underestimate the experimental electron density (average resonant-cavity measurements) by a factor of 3-4. [1] L. Marques et al, J. Appl. Phys. 102, 063305 (2007).Universidade do MinhoAlves, L. L.Marques, L.Pintassilgo, C. D.Wattieaux, G.Berndt, J.Boufendi, L.Es-Sebbar, E. T.Carrasco, N.Cernogora, G.20112011-01-01T00:00:00Zconference posterinfo:eu-repo/semantics/publishedVersionapplication/pdfhttp://hdl.handle.net/1822/14559enghttp://www.aps.org/meetings/meeting.cfm?name=GEC11info:eu-repo/semantics/openAccessreponame:Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)instname:FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologiainstacron:RCAAP2024-05-11T07:25:53Zoai:repositorium.sdum.uminho.pt:1822/14559Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireinfo@rcaap.ptopendoar:https://opendoar.ac.uk/repository/71602025-05-28T16:27:03.564100Repositórios Científicos de Acesso Aberto de Portugal (RCAAP) - FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologiafalse |
| dc.title.none.fl_str_mv |
Capacitively coupled radio-frequency discharges in nitrogen at low-pressure |
| title |
Capacitively coupled radio-frequency discharges in nitrogen at low-pressure |
| spellingShingle |
Capacitively coupled radio-frequency discharges in nitrogen at low-pressure Alves, L. L. |
| title_short |
Capacitively coupled radio-frequency discharges in nitrogen at low-pressure |
| title_full |
Capacitively coupled radio-frequency discharges in nitrogen at low-pressure |
| title_fullStr |
Capacitively coupled radio-frequency discharges in nitrogen at low-pressure |
| title_full_unstemmed |
Capacitively coupled radio-frequency discharges in nitrogen at low-pressure |
| title_sort |
Capacitively coupled radio-frequency discharges in nitrogen at low-pressure |
| author |
Alves, L. L. |
| author_facet |
Alves, L. L. Marques, L. Pintassilgo, C. D. Wattieaux, G. Berndt, J. Boufendi, L. Es-Sebbar, E. T. Carrasco, N. Cernogora, G. |
| author_role |
author |
| author2 |
Marques, L. Pintassilgo, C. D. Wattieaux, G. Berndt, J. Boufendi, L. Es-Sebbar, E. T. Carrasco, N. Cernogora, G. |
| author2_role |
author author author author author author author author |
| dc.contributor.none.fl_str_mv |
Universidade do Minho |
| dc.contributor.author.fl_str_mv |
Alves, L. L. Marques, L. Pintassilgo, C. D. Wattieaux, G. Berndt, J. Boufendi, L. Es-Sebbar, E. T. Carrasco, N. Cernogora, G. |
| description |
Apresentação em poster; publicado em: Bulletin of the American Physical Society. 56:15 (2011). |
| publishDate |
2011 |
| dc.date.none.fl_str_mv |
2011 2011-01-01T00:00:00Z |
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conference poster |
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info:eu-repo/semantics/publishedVersion |
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publishedVersion |
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http://hdl.handle.net/1822/14559 |
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http://hdl.handle.net/1822/14559 |
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eng |
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eng |
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http://www.aps.org/meetings/meeting.cfm?name=GEC11 |
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info:eu-repo/semantics/openAccess |
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openAccess |
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application/pdf |
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