Electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen

Bibliographic Details
Main Author: Marques, L.
Publication Date: 2007
Other Authors: Jolly, Jacques, Alves, L. L.
Format: Article
Language: eng
Source: Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)
Download full: http://hdl.handle.net/1822/6530
Summary: This work presents modeling and experimental results for the electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen. A two-dimensional, time-dependent fluid model is used to describe the dynamics of electrons and positive ions H+, H2+, and H3+at different frequencies (13.56–80 MHz), pressures (0.2–1 Torr), and rf applied voltages (50–800 V). The current-voltage relationship is reported and found in good qualitative agreement with experiment. The distribution, between electrons and ions, of the electrical power coupled to the plasma is analyzed. An investigation of the scaling laws for several important plasma parameters is also carried out.
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spelling Electrical characterization of capacitively-coupled radio-frequency discharges in hydrogenPlasma-enhanced chemical vapor deposition (PECVD)Radio-frequency glow discharge (RFGD)hydrogenscaling lawsScience & TechnologyThis work presents modeling and experimental results for the electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen. A two-dimensional, time-dependent fluid model is used to describe the dynamics of electrons and positive ions H+, H2+, and H3+at different frequencies (13.56–80 MHz), pressures (0.2–1 Torr), and rf applied voltages (50–800 V). The current-voltage relationship is reported and found in good qualitative agreement with experiment. The distribution, between electrons and ions, of the electrical power coupled to the plasma is analyzed. An investigation of the scaling laws for several important plasma parameters is also carried out.Fundação Calouste GulbenkianJohn Wiley and SonsUniversidade do MinhoMarques, L.Jolly, JacquesAlves, L. L.2007-052007-05-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/6530eng"Plasma processes and polymers". ISSN 1612-8850. 4:S1 (Apr. 2007) S937-S941.1612-885010.1002/ppap.200732303info:eu-repo/semantics/openAccessreponame:Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)instname:FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologiainstacron:RCAAP2024-05-11T05:43:40Zoai:repositorium.sdum.uminho.pt:1822/6530Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireinfo@rcaap.ptopendoar:https://opendoar.ac.uk/repository/71602025-05-28T15:27:54.360756Repositórios Científicos de Acesso Aberto de Portugal (RCAAP) - FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologiafalse
dc.title.none.fl_str_mv Electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen
title Electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen
spellingShingle Electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen
Marques, L.
Plasma-enhanced chemical vapor deposition (PECVD)
Radio-frequency glow discharge (RFGD)
hydrogen
scaling laws
Science & Technology
title_short Electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen
title_full Electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen
title_fullStr Electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen
title_full_unstemmed Electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen
title_sort Electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen
author Marques, L.
author_facet Marques, L.
Jolly, Jacques
Alves, L. L.
author_role author
author2 Jolly, Jacques
Alves, L. L.
author2_role author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Marques, L.
Jolly, Jacques
Alves, L. L.
dc.subject.por.fl_str_mv Plasma-enhanced chemical vapor deposition (PECVD)
Radio-frequency glow discharge (RFGD)
hydrogen
scaling laws
Science & Technology
topic Plasma-enhanced chemical vapor deposition (PECVD)
Radio-frequency glow discharge (RFGD)
hydrogen
scaling laws
Science & Technology
description This work presents modeling and experimental results for the electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen. A two-dimensional, time-dependent fluid model is used to describe the dynamics of electrons and positive ions H+, H2+, and H3+at different frequencies (13.56–80 MHz), pressures (0.2–1 Torr), and rf applied voltages (50–800 V). The current-voltage relationship is reported and found in good qualitative agreement with experiment. The distribution, between electrons and ions, of the electrical power coupled to the plasma is analyzed. An investigation of the scaling laws for several important plasma parameters is also carried out.
publishDate 2007
dc.date.none.fl_str_mv 2007-05
2007-05-01T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/6530
url http://hdl.handle.net/1822/6530
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv "Plasma processes and polymers". ISSN 1612-8850. 4:S1 (Apr. 2007) S937-S941.
1612-8850
10.1002/ppap.200732303
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv John Wiley and Sons
publisher.none.fl_str_mv John Wiley and Sons
dc.source.none.fl_str_mv reponame:Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)
instname:FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologia
instacron:RCAAP
instname_str FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologia
instacron_str RCAAP
institution RCAAP
reponame_str Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)
collection Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)
repository.name.fl_str_mv Repositórios Científicos de Acesso Aberto de Portugal (RCAAP) - FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologia
repository.mail.fl_str_mv info@rcaap.pt
_version_ 1833595333192450048

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