Capacitively coupled hydrogen discharges : modeling vs. experiment

Detalhes bibliográficos
Autor(a) principal: Marques, L.
Data de Publicação: 2004
Outros Autores: Jolly, Jacques, Gousset, G., Alves, L. L.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)
Texto Completo: http://hdl.handle.net/1822/3011
Resumo: This paper presents a systematic characterization of hydrogen capacitively coupled very high frequency discharges, produced within a parallel plate cylindrical setup, by comparing numerical simulations to experimental measurements for various plasma parameters. A good quantitative agreement is found between calculation and experiment for the coupled electrical power and the plasma potential, at various frequencies, pressures and applied voltages. However, the model generally underestimates the electron density and the self-bias potential with respect to measured values. Model predictions for the absolute density of H(n=1) atoms are compared to first diagnostic results, obtained by two-photon absorption laser-induced fluorescence diagnostics at various pressures and frequencies.
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spelling Capacitively coupled hydrogen discharges : modeling vs. experimentCapacitively coupled dischargesRadio-frequency dischargesHydrogen plasmaHydrogen atomsKinetic modelScience & TechnologyThis paper presents a systematic characterization of hydrogen capacitively coupled very high frequency discharges, produced within a parallel plate cylindrical setup, by comparing numerical simulations to experimental measurements for various plasma parameters. A good quantitative agreement is found between calculation and experiment for the coupled electrical power and the plasma potential, at various frequencies, pressures and applied voltages. However, the model generally underestimates the electron density and the self-bias potential with respect to measured values. Model predictions for the absolute density of H(n=1) atoms are compared to first diagnostic results, obtained by two-photon absorption laser-induced fluorescence diagnostics at various pressures and frequencies.Fundação para a Ciência e a Tecnologia (FCT) - SFRH/BD/5012/2001Begell House, Inc.Universidade do MinhoMarques, L.Jolly, JacquesGousset, G.Alves, L. L.2004-122004-12-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/3011eng"High Temperature Material Processes" ISSN 1093-3611. 8 (2004) 499-519.1093-361110.1615/HighTempMatProc.v8.i4.20info:eu-repo/semantics/openAccessreponame:Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)instname:FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologiainstacron:RCAAP2024-05-11T04:46:17Zoai:repositorium.sdum.uminho.pt:1822/3011Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireinfo@rcaap.ptopendoar:https://opendoar.ac.uk/repository/71602025-05-28T14:57:55.280748Repositórios Científicos de Acesso Aberto de Portugal (RCAAP) - FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologiafalse
dc.title.none.fl_str_mv Capacitively coupled hydrogen discharges : modeling vs. experiment
title Capacitively coupled hydrogen discharges : modeling vs. experiment
spellingShingle Capacitively coupled hydrogen discharges : modeling vs. experiment
Marques, L.
Capacitively coupled discharges
Radio-frequency discharges
Hydrogen plasma
Hydrogen atoms
Kinetic model
Science & Technology
title_short Capacitively coupled hydrogen discharges : modeling vs. experiment
title_full Capacitively coupled hydrogen discharges : modeling vs. experiment
title_fullStr Capacitively coupled hydrogen discharges : modeling vs. experiment
title_full_unstemmed Capacitively coupled hydrogen discharges : modeling vs. experiment
title_sort Capacitively coupled hydrogen discharges : modeling vs. experiment
author Marques, L.
author_facet Marques, L.
Jolly, Jacques
Gousset, G.
Alves, L. L.
author_role author
author2 Jolly, Jacques
Gousset, G.
Alves, L. L.
author2_role author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Marques, L.
Jolly, Jacques
Gousset, G.
Alves, L. L.
dc.subject.por.fl_str_mv Capacitively coupled discharges
Radio-frequency discharges
Hydrogen plasma
Hydrogen atoms
Kinetic model
Science & Technology
topic Capacitively coupled discharges
Radio-frequency discharges
Hydrogen plasma
Hydrogen atoms
Kinetic model
Science & Technology
description This paper presents a systematic characterization of hydrogen capacitively coupled very high frequency discharges, produced within a parallel plate cylindrical setup, by comparing numerical simulations to experimental measurements for various plasma parameters. A good quantitative agreement is found between calculation and experiment for the coupled electrical power and the plasma potential, at various frequencies, pressures and applied voltages. However, the model generally underestimates the electron density and the self-bias potential with respect to measured values. Model predictions for the absolute density of H(n=1) atoms are compared to first diagnostic results, obtained by two-photon absorption laser-induced fluorescence diagnostics at various pressures and frequencies.
publishDate 2004
dc.date.none.fl_str_mv 2004-12
2004-12-01T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/3011
url http://hdl.handle.net/1822/3011
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv "High Temperature Material Processes" ISSN 1093-3611. 8 (2004) 499-519.
1093-3611
10.1615/HighTempMatProc.v8.i4.20
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Begell House, Inc.
publisher.none.fl_str_mv Begell House, Inc.
dc.source.none.fl_str_mv reponame:Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)
instname:FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologia
instacron:RCAAP
instname_str FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologia
instacron_str RCAAP
institution RCAAP
reponame_str Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)
collection Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)
repository.name.fl_str_mv Repositórios Científicos de Acesso Aberto de Portugal (RCAAP) - FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologia
repository.mail.fl_str_mv info@rcaap.pt
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