Foundry Polymer-Based Inverted-Rib Waveguides

Bibliographic Details
Main Author: Malheiros-Silveira, G. N. [UNESP]
Publication Date: 2018
Other Authors: Finardi, C. A., Van Etten, E. A. M. A., Burger, T. S., Silva, R. C. G. da, Daltrini, A. M., Panepucci, R. R., IEEE
Format: Conference object
Language: eng
Source: Repositório Institucional da UNESP
Download full: http://hdl.handle.net/11449/184348
Summary: Development of polymer inverted-rib waveguides based on high-volume CMOS foundry process is presented. Simulation of waveguiding structures using a basic inverted waveguide manufacturing process showed that viable devices can be obtained. Full wafers were processed at the foundry's 150 mm-facility. Photomask layout and manufacturing as well as wafer post-processing and characterization were carried out. As preliminary results, spectral filters based on integrated ring resonators with free spectral range (FSR) of 1 nm are presented.
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spelling Foundry Polymer-Based Inverted-Rib Waveguidesoptical device fabricationoptical polymersoptical resonatorsDevelopment of polymer inverted-rib waveguides based on high-volume CMOS foundry process is presented. Simulation of waveguiding structures using a basic inverted waveguide manufacturing process showed that viable devices can be obtained. Full wafers were processed at the foundry's 150 mm-facility. Photomask layout and manufacturing as well as wafer post-processing and characterization were carried out. As preliminary results, spectral filters based on integrated ring resonators with free spectral range (FSR) of 1 nm are presented.Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)Ctr Tecnol Informacao CTI Renato Archer, BR-13069901 Campinas, SP, BrazilUniv Estadual Paulista UNESP, Campus Expt Sao Joao da Boa Vista, BR-13876750 Sao Paulo, SP, BrazilCEITEC SA Semicond, BR-91550000 Porto Alegre, RS, BrazilUniv Estadual Paulista UNESP, Campus Expt Sao Joao da Boa Vista, BR-13876750 Sao Paulo, SP, BrazilCNPq: 456294/2013-9CNPq: 300594/2017-8FAPESP: 13/07559-3FAPESP: 09/54045IeeeCtr Tecnol Informacao CTI Renato ArcherUniversidade Estadual Paulista (Unesp)CEITEC SA SemicondMalheiros-Silveira, G. N. [UNESP]Finardi, C. A.Van Etten, E. A. M. A.Burger, T. S.Silva, R. C. G. daDaltrini, A. M.Panepucci, R. R.IEEE2019-10-04T11:56:52Z2019-10-04T11:56:52Z2018-01-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObject32018 Sbfoton International Optics And Photonics Conference (sbfoton Iopc). New York: Ieee, 3 p., 2018.http://hdl.handle.net/11449/184348WOS:000458662800022Web of Sciencereponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPeng2018 Sbfoton International Optics And Photonics Conference (sbfoton Iopc)info:eu-repo/semantics/openAccess2025-04-03T15:37:36Zoai:repositorio.unesp.br:11449/184348Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestrepositoriounesp@unesp.bropendoar:29462025-04-03T15:37:36Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false
dc.title.none.fl_str_mv Foundry Polymer-Based Inverted-Rib Waveguides
title Foundry Polymer-Based Inverted-Rib Waveguides
spellingShingle Foundry Polymer-Based Inverted-Rib Waveguides
Malheiros-Silveira, G. N. [UNESP]
optical device fabrication
optical polymers
optical resonators
title_short Foundry Polymer-Based Inverted-Rib Waveguides
title_full Foundry Polymer-Based Inverted-Rib Waveguides
title_fullStr Foundry Polymer-Based Inverted-Rib Waveguides
title_full_unstemmed Foundry Polymer-Based Inverted-Rib Waveguides
title_sort Foundry Polymer-Based Inverted-Rib Waveguides
author Malheiros-Silveira, G. N. [UNESP]
author_facet Malheiros-Silveira, G. N. [UNESP]
Finardi, C. A.
Van Etten, E. A. M. A.
Burger, T. S.
Silva, R. C. G. da
Daltrini, A. M.
Panepucci, R. R.
IEEE
author_role author
author2 Finardi, C. A.
Van Etten, E. A. M. A.
Burger, T. S.
Silva, R. C. G. da
Daltrini, A. M.
Panepucci, R. R.
IEEE
author2_role author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv Ctr Tecnol Informacao CTI Renato Archer
Universidade Estadual Paulista (Unesp)
CEITEC SA Semicond
dc.contributor.author.fl_str_mv Malheiros-Silveira, G. N. [UNESP]
Finardi, C. A.
Van Etten, E. A. M. A.
Burger, T. S.
Silva, R. C. G. da
Daltrini, A. M.
Panepucci, R. R.
IEEE
dc.subject.por.fl_str_mv optical device fabrication
optical polymers
optical resonators
topic optical device fabrication
optical polymers
optical resonators
description Development of polymer inverted-rib waveguides based on high-volume CMOS foundry process is presented. Simulation of waveguiding structures using a basic inverted waveguide manufacturing process showed that viable devices can be obtained. Full wafers were processed at the foundry's 150 mm-facility. Photomask layout and manufacturing as well as wafer post-processing and characterization were carried out. As preliminary results, spectral filters based on integrated ring resonators with free spectral range (FSR) of 1 nm are presented.
publishDate 2018
dc.date.none.fl_str_mv 2018-01-01
2019-10-04T11:56:52Z
2019-10-04T11:56:52Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/conferenceObject
format conferenceObject
status_str publishedVersion
dc.identifier.uri.fl_str_mv 2018 Sbfoton International Optics And Photonics Conference (sbfoton Iopc). New York: Ieee, 3 p., 2018.
http://hdl.handle.net/11449/184348
WOS:000458662800022
identifier_str_mv 2018 Sbfoton International Optics And Photonics Conference (sbfoton Iopc). New York: Ieee, 3 p., 2018.
WOS:000458662800022
url http://hdl.handle.net/11449/184348
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 2018 Sbfoton International Optics And Photonics Conference (sbfoton Iopc)
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 3
dc.publisher.none.fl_str_mv Ieee
publisher.none.fl_str_mv Ieee
dc.source.none.fl_str_mv Web of Science
reponame:Repositório Institucional da UNESP
instname:Universidade Estadual Paulista (UNESP)
instacron:UNESP
instname_str Universidade Estadual Paulista (UNESP)
instacron_str UNESP
institution UNESP
reponame_str Repositório Institucional da UNESP
collection Repositório Institucional da UNESP
repository.name.fl_str_mv Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)
repository.mail.fl_str_mv repositoriounesp@unesp.br
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