APA Citation

Pessoa,R. S., Murakami,G., Petraconi,G., Maciel,H. S., Oliveira,I. C., & Grigorov,K. G. (2006). Hollow cathode magnetron deposition of AlN thin films: Crystalline structure and morphology.

Chicago Style Citation

Pessoa,R. S., Murakami,G, Petraconi,G, Maciel,H. S, Oliveira,I. C, and Grigorov,K. G. Hollow Cathode Magnetron Deposition of AlN Thin Films: Crystalline Structure and Morphology. 2006.

MLA Citation

Pessoa,R. S., et al. Hollow Cathode Magnetron Deposition of AlN Thin Films: Crystalline Structure and Morphology. 2006.

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