Surface Smoothing by Gas Cluster Ion Beam Using Decreasing Three-Step Energy Treatment

Detalhes bibliográficos
Autor(a) principal: Pelenovich, Vasiliy
Data de Publicação: 2023
Outros Autores: Zeng, Xiaomei, Zhang, Xiangyu, Fu, Dejun, Lei, Yan, Yang, Bing, Tolstoguzov, Alexander
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)
Texto Completo: http://hdl.handle.net/10362/159771
Resumo: Funding Information: This work was supported by the Hubei Provincial and Municipal Double First-class Talent Construction Start-up Fund in 2022 (Project No. 600460045), the Key R&D program of Hubei Province (Grant No. 2022BAA049), the Science and Technology Planning Project of Shenzhen Municipality (Grant Nos. 2019N032, JCYJ20220530140605011), and the National Key Research and Development Program of China (Grant No. 2022YFB4601000). Publisher Copyright: © 2023 by the authors.
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spelling Surface Smoothing by Gas Cluster Ion Beam Using Decreasing Three-Step Energy Treatmentgas cluster ion beamnanoscale craterspower spectral density functionsurface roughnesssurface smoothingSurfaces and InterfacesSurfaces, Coatings and FilmsMaterials ChemistryFunding Information: This work was supported by the Hubei Provincial and Municipal Double First-class Talent Construction Start-up Fund in 2022 (Project No. 600460045), the Key R&D program of Hubei Province (Grant No. 2022BAA049), the Science and Technology Planning Project of Shenzhen Municipality (Grant Nos. 2019N032, JCYJ20220530140605011), and the National Key Research and Development Program of China (Grant No. 2022YFB4601000). Publisher Copyright: © 2023 by the authors.A three-step treatment of Si wafers by gas cluster ion beam with decreasing energy was used to improve the performance of surface smoothing. First, a high energy treatment at 15 keV and an ion fluence of 2 × 1016 cm−2 was used to remove initial surface features (scratches). Next, treatments at 8 and 5 keV with the same fluences reduced the roughness that arose due to the formation of morphological features induced by the surface sputtering at the first high energy step. The surface morphology was characterized by the atomic force microscopy. The root mean square roughness Rq and 2D isotropic power spectral density functions were analyzed. For comparison, the smoothing performances of single-step treatments at 15, 8, and 5 keV were also studied. The lowest roughness values achieved for the single and three-step treatments were 1.06 and 0.65 nm, respectively.CeFITec – Centro de Física e Investigação TecnológicaRUNPelenovich, VasiliyZeng, XiaomeiZhang, XiangyuFu, DejunLei, YanYang, BingTolstoguzov, Alexander2023-11-09T22:09:45Z2023-05-172023-05-17T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/article8application/pdfhttp://hdl.handle.net/10362/159771engPelenovich, V., Zeng, X., Zhang, X., Fu, D., Lei, Y., Yang, B., & Tolstoguzov, A. (2023). Surface Smoothing by Gas Cluster Ion Beam Using Decreasing Three-Step Energy Treatment. COATINGS, 13(5), [942]. https://doi.org/10.3390/coatings130509422079-6412PURE: 75765290https://doi.org/10.3390/coatings13050942info:eu-repo/semantics/openAccessreponame:Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)instname:FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologiainstacron:RCAAP2024-05-22T18:15:34Zoai:run.unl.pt:10362/159771Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireinfo@rcaap.ptopendoar:https://opendoar.ac.uk/repository/71602025-05-28T17:46:20.501014Repositórios Científicos de Acesso Aberto de Portugal (RCAAP) - FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologiafalse
dc.title.none.fl_str_mv Surface Smoothing by Gas Cluster Ion Beam Using Decreasing Three-Step Energy Treatment
title Surface Smoothing by Gas Cluster Ion Beam Using Decreasing Three-Step Energy Treatment
spellingShingle Surface Smoothing by Gas Cluster Ion Beam Using Decreasing Three-Step Energy Treatment
Pelenovich, Vasiliy
gas cluster ion beam
nanoscale craters
power spectral density function
surface roughness
surface smoothing
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry
title_short Surface Smoothing by Gas Cluster Ion Beam Using Decreasing Three-Step Energy Treatment
title_full Surface Smoothing by Gas Cluster Ion Beam Using Decreasing Three-Step Energy Treatment
title_fullStr Surface Smoothing by Gas Cluster Ion Beam Using Decreasing Three-Step Energy Treatment
title_full_unstemmed Surface Smoothing by Gas Cluster Ion Beam Using Decreasing Three-Step Energy Treatment
title_sort Surface Smoothing by Gas Cluster Ion Beam Using Decreasing Three-Step Energy Treatment
author Pelenovich, Vasiliy
author_facet Pelenovich, Vasiliy
Zeng, Xiaomei
Zhang, Xiangyu
Fu, Dejun
Lei, Yan
Yang, Bing
Tolstoguzov, Alexander
author_role author
author2 Zeng, Xiaomei
Zhang, Xiangyu
Fu, Dejun
Lei, Yan
Yang, Bing
Tolstoguzov, Alexander
author2_role author
author
author
author
author
author
dc.contributor.none.fl_str_mv CeFITec – Centro de Física e Investigação Tecnológica
RUN
dc.contributor.author.fl_str_mv Pelenovich, Vasiliy
Zeng, Xiaomei
Zhang, Xiangyu
Fu, Dejun
Lei, Yan
Yang, Bing
Tolstoguzov, Alexander
dc.subject.por.fl_str_mv gas cluster ion beam
nanoscale craters
power spectral density function
surface roughness
surface smoothing
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry
topic gas cluster ion beam
nanoscale craters
power spectral density function
surface roughness
surface smoothing
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry
description Funding Information: This work was supported by the Hubei Provincial and Municipal Double First-class Talent Construction Start-up Fund in 2022 (Project No. 600460045), the Key R&D program of Hubei Province (Grant No. 2022BAA049), the Science and Technology Planning Project of Shenzhen Municipality (Grant Nos. 2019N032, JCYJ20220530140605011), and the National Key Research and Development Program of China (Grant No. 2022YFB4601000). Publisher Copyright: © 2023 by the authors.
publishDate 2023
dc.date.none.fl_str_mv 2023-11-09T22:09:45Z
2023-05-17
2023-05-17T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/10362/159771
url http://hdl.handle.net/10362/159771
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Pelenovich, V., Zeng, X., Zhang, X., Fu, D., Lei, Y., Yang, B., & Tolstoguzov, A. (2023). Surface Smoothing by Gas Cluster Ion Beam Using Decreasing Three-Step Energy Treatment. COATINGS, 13(5), [942]. https://doi.org/10.3390/coatings13050942
2079-6412
PURE: 75765290
https://doi.org/10.3390/coatings13050942
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 8
application/pdf
dc.source.none.fl_str_mv reponame:Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)
instname:FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologia
instacron:RCAAP
instname_str FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologia
instacron_str RCAAP
institution RCAAP
reponame_str Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)
collection Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)
repository.name.fl_str_mv Repositórios Científicos de Acesso Aberto de Portugal (RCAAP) - FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologia
repository.mail.fl_str_mv info@rcaap.pt
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