Amorphous carbon thin films

Bibliographic Details
Main Author: Adame, C. F.
Publication Date: 2023
Other Authors: Alves, E., Barradas, N. P., Costa Pinto, P., Delaup, Y., Ferreira, I. M. M., Neupert, H., Himmerlich, M., Pfeiffer, S., Rimoldi, M., Taborelli, M., Teodoro, O. M. N. D., Bundaleski, N.
Format: Article
Language: eng
Source: Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)
Download full: http://hdl.handle.net/10362/159761
Summary: Publisher Copyright: © 2023 Author(s).
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spelling Amorphous carbon thin filmsMechanisms of hydrogen incorporation during magnetron sputtering and consequences for the secondary electron emissionCondensed Matter PhysicsSurfaces and InterfacesSurfaces, Coatings and FilmsPublisher Copyright: © 2023 Author(s).Amorphous carbon (a-C) films, having low secondary electron yield (SEY), are used at CERN to suppress electron multipacting in the beam pipes of particle accelerators. It was already demonstrated that hydrogen impurities increase the SEY of a-C films. In this work, a systematic characterization of a set of a-C coatings, deliberately contaminated by deuterium during the magnetron sputtering deposition, by scanning electron microscopy, ion beam analysis, secondary ion mass spectrometry, and optical absorption spectroscopy was performed to establish a correlation between the hydrogen content and the secondary electron emission properties. In parallel, the mechanisms of contamination were also investigated. Adding deuterium allows resolving the contributions of intentional and natural contamination. The results enabled us to quantify the relative deuterium/hydrogen (D/H) amounts and relate them with the maximum SEY (SEYmax). The first step of incorporation appears to be formation of D/H atoms in the discharge. An increase in both the flux of deposited carbon atoms and the discharge current with a D2 fraction in the gas discharge can be explained by target poisoning with deuterium species followed by etching of CxDy clusters, mainly by physical sputtering. For overall relative D/H amounts between 11% and 47% in the discharge gas, the SEYmax increases almost linearly from 0.99 to 1.38. An abrupt growth of SEYmax from 1.38 to 2.12 takes place in the narrow range of D/H relative content of 47%-54%, for which the nature of the deposited films changes to a polymer-like layer.DF – Departamento de FísicaCeFITec – Centro de Física e Investigação TecnológicaDCM - Departamento de Ciência dos MateriaisCENIMAT-i3N - Centro de Investigação de Materiais (Lab. Associado I3N)RUNAdame, C. F.Alves, E.Barradas, N. P.Costa Pinto, P.Delaup, Y.Ferreira, I. M. M.Neupert, H.Himmerlich, M.Pfeiffer, S.Rimoldi, M.Taborelli, M.Teodoro, O. M. N. D.Bundaleski, N.2023-11-09T22:09:04Z2023-072023-07-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/article13application/pdfhttp://hdl.handle.net/10362/159761eng0734-2101PURE: 75754497https://doi.org/10.1116/6.0002759info:eu-repo/semantics/openAccessreponame:Repositórios Científicos de Acesso Aberto de Portugal (RCAAP)instname:FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologiainstacron:RCAAP2024-05-22T18:15:33Zoai:run.unl.pt:10362/159761Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireinfo@rcaap.ptopendoar:https://opendoar.ac.uk/repository/71602025-05-28T17:46:19.841640Repositórios Científicos de Acesso Aberto de Portugal (RCAAP) - FCCN, serviços digitais da FCT – Fundação para a Ciência e a Tecnologiafalse
dc.title.none.fl_str_mv Amorphous carbon thin films
Mechanisms of hydrogen incorporation during magnetron sputtering and consequences for the secondary electron emission
title Amorphous carbon thin films
spellingShingle Amorphous carbon thin films
Adame, C. F.
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
title_short Amorphous carbon thin films
title_full Amorphous carbon thin films
title_fullStr Amorphous carbon thin films
title_full_unstemmed Amorphous carbon thin films
title_sort Amorphous carbon thin films
author Adame, C. F.
author_facet Adame, C. F.
Alves, E.
Barradas, N. P.
Costa Pinto, P.
Delaup, Y.
Ferreira, I. M. M.
Neupert, H.
Himmerlich, M.
Pfeiffer, S.
Rimoldi, M.
Taborelli, M.
Teodoro, O. M. N. D.
Bundaleski, N.
author_role author
author2 Alves, E.
Barradas, N. P.
Costa Pinto, P.
Delaup, Y.
Ferreira, I. M. M.
Neupert, H.
Himmerlich, M.
Pfeiffer, S.
Rimoldi, M.
Taborelli, M.
Teodoro, O. M. N. D.
Bundaleski, N.
author2_role author
author
author
author
author
author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv DF – Departamento de Física
CeFITec – Centro de Física e Investigação Tecnológica
DCM - Departamento de Ciência dos Materiais
CENIMAT-i3N - Centro de Investigação de Materiais (Lab. Associado I3N)
RUN
dc.contributor.author.fl_str_mv Adame, C. F.
Alves, E.
Barradas, N. P.
Costa Pinto, P.
Delaup, Y.
Ferreira, I. M. M.
Neupert, H.
Himmerlich, M.
Pfeiffer, S.
Rimoldi, M.
Taborelli, M.
Teodoro, O. M. N. D.
Bundaleski, N.
dc.subject.por.fl_str_mv Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
topic Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
description Publisher Copyright: © 2023 Author(s).
publishDate 2023
dc.date.none.fl_str_mv 2023-11-09T22:09:04Z
2023-07
2023-07-01T00:00:00Z
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dc.relation.none.fl_str_mv 0734-2101
PURE: 75754497
https://doi.org/10.1116/6.0002759
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